HORIBA光纖型化學(xué)藥液濃度計(jì)CS-600F可以在單槽或單晶圓清洗系統(tǒng)中檢測(cè)多種化學(xué)藥液

2025/02/13 14:18:57

CS-600F

光纖型化學(xué)藥液濃度計(jì)

CS-600F 提供適合生產(chǎn)的更高級(jí)功能，如在各種應(yīng)用中對(duì)高溫化學(xué)藥液進(jìn)行在線測(cè)量的能力，減少停機(jī)時(shí)間的穩(wěn)定運(yùn)行，以及提高空間生產(chǎn)率的緊湊尺寸，以滿足*半導(dǎo)體濕法制程所需的準(zhǔn)確化學(xué)藥液濃度管理。

事業(yè)部: 半導(dǎo)體

產(chǎn)品分類: 濕法過程控制

制造商: HORIBA Advanced Techno Co., Ltd.

尺寸更小，布局更靈活
CS-600F 濃度計(jì)尺寸緊湊，與成熟型號(hào)（CS-100F1 系列）相比，高度降低 36%，體積減少 40%，樣品單元光纖電纜所需的空間減少 46%。
光源單元和濃度計(jì)主機(jī)可以遠(yuǎn)程單獨(dú)安裝，支持根據(jù)化學(xué)藥液?jiǎn)卧颓逑丛O(shè)備的位置靈活安裝。

高溫化學(xué)溶液（20 至 80℃）的高穩(wěn)定性在線測(cè)量
新的光學(xué)系統(tǒng)和改進(jìn)的處理算法支持在線測(cè)量高溫化學(xué)藥液，這是*濕法制程的關(guān)鍵一步。這消除了冷卻化學(xué)樣品的需要。HORIBA 的 CS-600F 穩(wěn)定性高，實(shí)現(xiàn)了更有效和準(zhǔn)確的化學(xué)藥液管理。

背景校正頻率顯著降低
與成熟型號(hào)（CS-100F1系列）相比，定期校正頻率顯著降低，這反過來又顯著減少了機(jī)臺(tái)停機(jī)時(shí)間，有助于提高產(chǎn)量。

單臺(tái)濃度計(jì)可測(cè)量多達(dá)六種化學(xué)藥液（藥液種類或濃度范圍）
單臺(tái)濃度計(jì)可測(cè)量多達(dá)六種化學(xué)藥液（藥液種類或濃度范圍）。可自由藥液類型和濃度范圍，CS-600F 保證滿足各種檢測(cè)要求。

可輸出多達(dá)六種組分的測(cè)量值（串行輸出）
成熟型號(hào)（CS-100F1 系列）可輸出四種組分的測(cè)量值（串行輸出）。CS-600F*號(hào)能以串行輸出方式輸出多達(dá)六種組分的測(cè)量值。CS-600F型號(hào)模擬輸出四種組分，而CS-100F1型號(hào)為兩種。

Model	CS-600F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Measurement target	NH3/H2O2/H2O (reperesentative specification) * Please contact HORIBA regarding other chemicals.
Measurement range	NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、 H2O：93.3～100.0mass%
Repeatability	NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% Chemical temperature: Within ±1℃/1 hour
Sample solution temperature	20?80℃
Measurement cycle	Approx. 3 seconds
LCD display	(1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX)
Key input	(1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift
Parallel input	Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction
Parallel output	Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) (2) Monitor error (OFF at error) (3) Measuring (ON at measurement) (4) Chemical solution type for measurement (5) Echo to hot water correction input (6) Warning (ON at occurred) (7) Background correction status 8) Hot water correction status
Serial input	RS-232C (1) Request for readout of measurement data (2) Select chemical solution type to be measured (3) Hot water correction
Serial output	RS-232C (1) Measured data No. (2) Chemical solution type (3) Concentration value (4) Error code (5) Chemical temperature
Analog output	4 mA to 20 mA In case of monitor error occurs, measurement is stopped or invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution temperature input	Terminal block inlet (terminal screw M3) Platinum resistance temperature sensor: Pt100 (Three-conductor type, Class A) *Temperature sensor is not included.
Air (for operation and purge)	Connection port: 4 mm O.D. quick joint, Pressure: 0.2 MPa ±0.02 Mpa
Power source	100～230V AC（Single-Phase）、50/60Hz
Power consumption	Approx. 85 VA (transient electric current at the time of the start is excluded)
Weight	(Monitor) Approx. 3.6 kg (Lamp unit) Approx. 2.8 kg (Sample cell) Approx. 1.2 kg
Ambient temperature	(Monitor, Lamp unit) 20°C to 30°C (Sample cell, Optical fiber) 20°C to 35°C (Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity	(Monitor, Lamp unit, Sample cell) 40% to 70% (Should be no dew condensation)
Slanting angle at installation	(Monitor, Lamp unit) within ±1°
Optical fiber	Length: 5 m, minimum bend radius: R 150 mm

scrollable

Schematics

SKW微量呼吸檢壓儀/瓦式呼吸儀...

PT2.5R-1003-U1-H...

国内精品视频在线观看,亚洲国产精品超碰,亚洲熟妇真实自拍另类,一区二区三区四区国产精品视频},国产成人精品999},国产91白浆在线

HORIBA光纖型化學(xué)藥液濃度計(jì)CS-600F可以在單槽或單晶圓清洗系統(tǒng)中檢測(cè)多種化學(xué)藥液

CS-600F

光纖型化學(xué)藥液濃度計(jì)