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首頁(yè) >北崎國(guó)際貿(mào)易（北京）有限公司> 技術(shù)文章> HORIBA光纖型化學(xué)藥液濃度計(jì)CS-600F-1P25P5可以在單槽或單晶圓清洗系統(tǒng)中檢測(cè)多種化學(xué)藥液
HORIBA光纖型化學(xué)藥液濃度計(jì)CS-600F-1P25P5可以在單槽或單晶圓清洗系統(tǒng)中檢測(cè)多種化學(xué)藥液
2025/02/13 14:20:23
CS-600F
光纖型化學(xué)藥液濃度計(jì)
CS-600F 提供適合生產(chǎn)的更高級(jí)功能，如在各種應(yīng)用中對(duì)高溫化學(xué)藥液進(jìn)行在線測(cè)量的能力，減少停機(jī)時(shí)間的穩(wěn)定運(yùn)行，以及提高空間生產(chǎn)率的緊湊尺寸，以滿足*半導(dǎo)體濕法制程所需的準(zhǔn)確化學(xué)藥液濃度管理。
| Model | CS-600F | ||
|---|---|---|---|
|
Measurement principle |
Absorption spectroscopic method | ||
|
Calculation principle |
Temperature compensation type multivariate analysis | ||
| Measurement target |
NH3/H2O2/H2O (reperesentative specification) * Please contact HORIBA regarding other chemicals. |
||
| Measurement range |
NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、 H2O：93.3～100.0mass% |
||
| Repeatability |
NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% Chemical temperature: Within ±1℃/1 hour |
||
|
Sample solution temperature |
20?80℃ | ||
| Measurement cycle | Approx. 3 seconds | ||
|
LCD display |
(1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX) |
||
| Key input |
(1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift |
||
|
Parallel input |
Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction |
||
|
Parallel output |
Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) (2) Monitor error (OFF at error) (3) Measuring (ON at measurement) (4) Chemical solution type for measurement (5) Echo to hot water correction input (6) Warning (ON at occurred) (7) Background correction status 8) Hot water correction status |
||
| Serial input |
RS-232C (1) Request for readout of measurement data (2) Select chemical solution type to be measured (3) Hot water correction |
||
|
Serial output |
RS-232C |
||
|
Analog output |
4 mA to 20 mA In case of monitor error occurs, measurement is stopped or invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum. |
||
|
Chemical solution temperature input |
Terminal block inlet (terminal screw M3) Platinum resistance temperature sensor: Pt100 (Three-conductor type, Class A) *Temperature sensor is not included. |
||
|
Air (for operation and purge) |
Connection port: 4 mm O.D. quick joint, Pressure: 0.2 MPa ±0.02 Mpa |
||
| Power source | 100～230V AC（Single-Phase）、50/60Hz | ||
| Power consumption |
Approx. 85 VA (transient electric current at the time of the start is excluded) |
||
| Weight |
(Monitor) Approx. 3.6 kg (Lamp unit) Approx. 2.8 kg (Sample cell) Approx. 1.2 kg |
||
| Ambient temperature |
(Monitor, Lamp unit) 20°C to 30°C (Sample cell, Optical fiber) 20°C to 35°C (Sudden temperature change should be avoided, within ±1°C/1 hour) |
||
| Ambient humidity |
(Monitor, Lamp unit, Sample cell) 40% to 70% (Should be no dew condensation) |
||
| Slanting angle at installation | (Monitor, Lamp unit) within ±1° | ||
| Optical fiber | Length: 5 m, minimum bend radius: R 150 mm | ||
Schematics
