美國(guó)MKS*電容壓力計(jì)   MKS 631系列高溫*電容壓力計(jì)

631d是高溫電容壓力計(jì)，萬(wàn)機(jī)儀器過(guò)10年前推出RoHS版本。這些器件工作在非常高的內(nèi)部溫度，減少過(guò)程的副產(chǎn)物沉積在傳感器，它幾乎消除了由污染引起的輸出漂移。現(xiàn)有的工作溫度是150 C或200°°C，允許使用在*苛刻的真空半導(dǎo)體制造過(guò)程中如金屬蝕刻氮化硅薄膜的化學(xué)氣相沉積（CVD）。新的包裝減少至少40%的所需安裝空間量，使它在設(shè)計(jì)新系統(tǒng)或改造現(xiàn)有的設(shè)備更容易。

The 631D is completely self-contained requiring only input power of ±15VDC for operation. No separate electronics modules are used which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure eliminating the need for vacuum pumps during setpoint adjustment.

該631d是完全獨(dú)立的，需要±15VDC只有輸入功率運(yùn)行。不使用單獨(dú)的電子模塊，既減少了安裝空間的需要和提供更好的性能由于noisegenerating互連電纜的消除。它的鉻鎳鐵合金®傳感器提供了非常高的耐腐蝕性，其壓等級(jí)45磅/平方英寸確保良好的重復(fù)性和穩(wěn)定性無(wú)論系統(tǒng)的操作條件。631d型高性能模擬電子還包括安全過(guò)熱保護(hù)和LED狀態(tài)燈指示其操作狀態(tài)。一個(gè)內(nèi)部安裝的兩（2）UL的壓力和一個(gè)固態(tài)跳閘繼電器（1）UL批準(zhǔn)加熱器故障的機(jī)電式繼電器，是可用的，允許壓力控制外部設(shè)備或部件。壓力脫扣繼電器可由用戶調(diào)整獨(dú)立在大氣壓力設(shè)定值調(diào)整，消除過(guò)程中真空泵需要。

美國(guó)MKS*電容壓力計(jì)   MKS 631系列高溫*電容壓力計(jì)Features & Benefits:特點(diǎn)和優(yōu)點(diǎn)：

?Operating temperatures reduce contamination

?操作溫度，減少污染

?Compact design & self-contained electronics save space

?緊湊的設(shè)計(jì)和完備的電子節(jié)省空間

?Inconel® sensor resists corrosion

?Inconel®傳感器抗腐蝕

?Insensitive to gas composition

?不敏感的氣體組合物

?Performance is unaffected by pressure bursts

?性能不受壓力脈沖

?Optional pressure trip relays (2) for controlling external equipment

?可選跳閘繼電器（2）控制外部設(shè)備

美國(guó)MKS*電容壓力計(jì)   MKS 631系列高溫*電容壓力計(jì)Applications:應(yīng)用：

The 631D Baratron High Temperature Manometer is found in demanding vacuum processes for semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). It is also an ideal choice for use in biopharmaceutical processing equipment such as lyophilizers and sterilizers that use steam to prevent bacteria growth.

本公司631d高溫壓力計(jì)是發(fā)現(xiàn)在苛刻的真空的半導(dǎo)體制造過(guò)程，如金屬蝕刻氮化硅薄膜的化學(xué)氣相沉積（CVD）。這也是一個(gè)用于生物制藥加工設(shè)備如機(jī)和消毒，使用蒸汽防止細(xì)菌生長(zhǎng)的理想選擇。

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